XYZ三轴平移机构Z轴采用同步带将4根丝杆同步顶升，XY采用常规伺服平移用于在线式托盘平移常用于腔体托盘Z轴移动，结构简单供大家学习下载.. HIWIN HGH15-400.SLDASM(152.98KB)，HIWIN HGH15-520线轨.SLDASM(147.13KB)，BTK2005V-2.6ZZ.SLDASM(242.99KB)，S21008-114-000.SLDASM(4.15MB)，0_701m_10_6_028_0___106_34PZ_A2_2.SLDASM(298.25KB)，S21008-112-000.SLDASM(12.78MB)，R20-5T3-FSI-577.SLDASM(99.71KB)，R20-5T3-FSI-302.SLDASM(101.65KB)，R20-5T3-FSI-507.SLDASM(102.44KB)，S21008-113-000.SLDASM(1.41MB)